|
English
|
正體中文
|
简体中文
|
2816861
|
|
???header.visitor??? :
27620697
???header.onlineuser??? :
542
???header.sponsordeclaration???
|
|
|
???tair.name??? >
???browser.page.title.author???
|
"yau c"???jsp.browse.items-by-author.description???
Showing items 1-2 of 2 (1 Page(s) Totally) 1 View [10|25|50] records per page
臺大學術典藏 |
2018-09-10T05:18:50Z |
Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches
|
PING-HEI CHEN;et al.;WU, KY;YAU, C;CHEN, PH;PING-HEI CHEN; CHEN, PH; YAU, C; WU, KY; et al.; PING-HEI CHEN |
臺大學術典藏 |
2018-09-10T05:18:50Z |
Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches
|
PING-HEI CHEN;et al.;WU, KY;YAU, C;CHEN, PH;PING-HEI CHEN; CHEN, PH; YAU, C; WU, KY; et al.; PING-HEI CHEN |
Showing items 1-2 of 2 (1 Page(s) Totally) 1 View [10|25|50] records per page
|