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Institution	Date	Title	Author
國立成功大學	2007-07	Ultrathin decoupled plasma nitridation SiON gate dielectrics prepared with various rf powers	Hu, Chan-Yuan; Chen, Shih-Chih; Chen, Jone F.; Chang, Shoou-Jinn; Wang, Min-Hong; Yeh, Vita; Chen, Jung-Che

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