臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
元智大學	Jun-18	Silicon etching of difluoromethane atmospheric pressure plasma jet combined with its spectroscopic analysis	Yu-Ching Sung; Ta-Chin Wei; You-Chia Liu; Chun Huang
元智大學	Jan-18	Effect of low-pressure nitrogen plasma treatment on the surface properties and electrochemical performance of polyethylene separator using in lithium ion battery	Chun Li; Hsiao-Ling Li; Chi-Heng Li; Yu-Shuan Liu; Yu-Ching Sung; Chun Huang
元智大學	Feb-19	Research on the Gas Effect of Octafluorocyclobutane Plasma Jet at Atmospheric Pressure for Silicon Etching	Wei-Ting Liu; Ta-Chin Wei; Yu-Ching Sung; Chou-Yuan Cheng; Ting-Hao Chen; Chun Huang
元智大學	2018	利用噴射式大氣電漿束進行三氟甲烷電漿對單晶矽蝕刻	宋俞靜; Yu-Ching Sung
元智大學	2017-12-15	Investigation on the Carbon Tetrafluoride and Trifluoromethane Plasma Jet for Silicon Etching	Yu-Ching Sung; Chun Huang
元智大學	2017-11-16	Silicon Etching of Difluoromethane Atmospheric Pressure Plasma Jet combined with Its Spectroscopic Analysis	Yu-Ching Sung; Ta-Chin Wei; You-Chia Liu; Chun Huang
元智大學	2017-03-01	Investigation on the octafluorocyclobutane plasma jet for silicon etching	Yu-Ching Sung; Chun Huang

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