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Institution	Date	Title	Author
國立交通大學	2014-12-12T01:15:44Z	化學機械研磨製程之控片與樣片之移除率及不平坦度預測與分析	袁啟文; Chi-Wen, Yuan; 陳宗麟; 林家瑞; Tsung-Lin Cheng; Chia-Shui Lin

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