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Institution	Date	Title	Author
國立交通大學	2014-12-12T03:01:41Z	多片式電漿蝕刻機深溝槽蝕刻模擬模型的建立與製程最佳化	陳家樑; Chia-Liang Chen; 成維華; 賴振民; Wei-Hua Chieng; Jenn-Min Lai

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