臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
臺大學術典藏	2018-09-10T07:44:17Z	Modeling, Optimization and Control of Wafer-level Spatial Uniformity for Rapid Thermal Oxidation of Silicon Process	RUEY-SHAN GUO;M. Lan;A. Lin;A. Chen; RUEY-SHAN GUO; M. Lan; A. Lin; A. Chen; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:44:17Z	Equipment Health Index and Real-time Monitoring	RUEY-SHAN GUO;A. Chen; RUEY-SHAN GUO; A. Chen; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:44:17Z	Network Ready Semiconductor Manufacturing Cluster Tool	RUEY-SHAN GUO;A. Chen;C. Weng;S. Chang;P. Chang;C. Liu;C. Lu;S. Lee,;H. Huang;S. Lu; RUEY-SHAN GUO; A. Chen; C. Weng; S. Chang; P. Chang; C. Liu; C. Lu; S. Lee,; H. Huang; S. Lu; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:44:16Z	Function Decomposition and Cost Modeling for Wafer Manufacturing	RUEY-SHAN GUO;A. Chen; RUEY-SHAN GUO; A. Chen; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:44:15Z	A Self-Tuning Run-by-Run Process Controller for Processes subject to Random Disturbances	RUEY-SHAN GUO;S. Lu;A. Chen,;J. Chen;R. Guo; RUEY-SHAN GUO; S. Lu; A. Chen,; J. Chen; R. Guo; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:10:40Z	Self-tuning Process Control for Processes subject to Random Disturbances	RUEY-SHAN GUO;A. Chen;J. Chen; RUEY-SHAN GUO; A. Chen; J. Chen; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:10:40Z	An Enhanced Algorithm to Integrate Statistical Process Monitoring and Feedback Adjustment	RUEY-SHAN GUO;K. Wu;A. Chen; RUEY-SHAN GUO; K. Wu; A. Chen; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:10:40Z	An Integrated Approach to Semiconductor Equipment Monitoring	RUEY-SHAN GUO;A. Yang;A. Chen; RUEY-SHAN GUO; A. Yang; A. Chen; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:10:39Z	Statistical Monitoring of Thickness Data Using Bivariate Runs Rules	RUEY-SHAN GUO;C. Lee;A. Chen; RUEY-SHAN GUO; C. Lee; A. Chen; RUEY-SHAN GUO
臺大學術典藏	2018-09-10T07:10:39Z	A Real-time Equipment Monitoring and Fault Detection System	RUEY-SHAN GUO;C. Tseng;A. Chen;R. Guo; RUEY-SHAN GUO; C. Tseng; A. Chen; R. Guo; RUEY-SHAN GUO

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