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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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臺大學術典藏 2021-10-07T08:41:26Z Micromachining of Mesoporous Oxide Films for MEMS Structures J.-A. Paik; S.-K. Fan; C.-J. Kim; M. C. Wu; B. Dunn; SHIH-KANG FAN

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