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Taiwan Academic Institutional Repository >
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"blue j"
Showing items 1-10 of 37 (4 Page(s) Totally)
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| 臺大學術典藏 |
2021-08-05T02:41:49Z |
Device pattern impact on optical endpoint detection by interferometry for STI CMP
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Bourzgui S;Roussy A;Blue J;Georges G;Faivre E;Labory K;Allard A.; Bourzgui S; Roussy A; Blue J; Georges G; Faivre E; Labory K; Allard A.; JAKEY BLUE |
| 臺大學術典藏 |
2021-08-05T02:41:49Z |
Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing
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Rostami H;Blue J;Chen A;Yugma C.; Rostami H; Blue J; Chen A; Yugma C.; JAKEY BLUE |
| 臺大學術典藏 |
2021-08-05T02:41:49Z |
Chamber Mismatching Calibration with Adjusted Run-to-Run Regulation in Semiconductor Manufacturing
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Chouichi A;Blue J;Yugma C;Pasqualini F.; Chouichi A; Blue J; Yugma C; Pasqualini F.; JAKEY BLUE |
| 臺大學術典藏 |
2021-08-05T02:41:47Z |
Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing
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Rostami H;Blue J;Chen A;Yugma C.; Rostami H; Blue J; Chen A; Yugma C.; ARGON CHEN |
| 臺大學術典藏 |
2020-03-02T06:40:11Z |
Optimum sampling for track PEB CD integrated metrology
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Chen, A.; Hsueh, S.; Blue, J.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:11Z |
Recipe-independent indicator for tool health diagnosis and predictive maintenance
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Chen, A.; Blue, J.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:11Z |
Demand planning approaches to aggregating and forecasting interrelated demands for safety stock and backup capacity planning
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Chen, A.; Hsu, C.-H.; Blue, J.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:11Z |
Recipe-independent tool health indicator and fault prognosis
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Chen, A.; Blue, J.; Chou, T.-C.; Yang, T.-K.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:11Z |
Recipe-Independent Indicator for Tool Health Diagnosis and Predictive Maintenance
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Chen, A.; Blue, J.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:10Z |
Integration of scheduling and advanced process control in semiconductor manufacturing: Review and outlook
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Yugma, C.; Blue, J.; Dauzere-P?r?s, S.; Vialletelle, P.; JAKEY BLUE |
Showing items 1-10 of 37 (4 Page(s) Totally)
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