| 臺大學術典藏 |
2020-03-02T06:40:08Z |
Generalized Overall Equipment Effectiveness for integrated scheduling and process control
|
Kao, Y.-T.; Chang, S.-C.; Blue, J.; Dauzere-Peres, S.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:08Z |
Translation-Invariant Multiscale Energy-Based PCA for Monitoring Batch Processes in Semiconductor Manufacturing
|
Rato, T.J.; Blue, J.; Pinaton, J.; Reis, M.S.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:07Z |
Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data
|
Rostami, H.; Blue, J.; Yugma, C.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:07Z |
Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing
|
Chouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:07Z |
Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition: APC: Advanced process control; AM: Advanced metrology
|
Yang, W.-T.; Blue, J.; Roussy, A.; Reis, M.; Pinaton, J.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:07Z |
Impact of integrating equipment health in production scheduling for semiconductor fabrication
|
Kao, Y.-T.; Dauz?re-P?r?s, S.; Blue, J.; Chang, S.-C.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:06Z |
The detection and the control of machine/chamber mismatching in semiconductormanufacturing
|
Chouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:06Z |
Virtual metrology modeling based on Gaussian Bayesian network
|
Yang, W.-T.; Blue, J.; Roussy, A.; Reis, M.S.; Pinaton, J.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:06Z |
Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing
|
Rostami, H.; Blue, J.; Chen, A.; Yugma, C.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:39:58Z |
Recipe-independent tool health indicator and fault prognosis
|
Chen, A.; Blue, J.; Chou, T.-C.; Yang, T.-K.; ARGON CHEN |
| 臺大學術典藏 |
2020-03-02T06:39:57Z |
Recipe-independent indicator for tool health diagnosis and predictive maintenance
|
Chen, A.; Blue, J.; ARGON CHEN |
| 臺大學術典藏 |
2020-03-02T06:39:56Z |
Optimum sampling for track PEB CD integrated metrology
|
Chen, A.; Hsueh, S.; Blue, J.; ARGON CHEN |
| 臺大學術典藏 |
2020-03-02T06:39:52Z |
Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing
|
Rostami, H.; Blue, J.; Chen, A.; Yugma, C.; ARGON CHEN |
| 臺大學術典藏 |
2017 |
Equipment condition diagnosis and fault fingerprint extraction in semiconductor manufacturing
|
Rostami, H.; Blue, J.; Yugma, C.; JAKEY BLUE |
| 臺大學術典藏 |
2013 |
Tool condition diagnosis with a recipe-independent hierarchical monitoring scheme
|
Blue, J.; Gleispach, D.; Roussy, A.; Scheibelhofer, P.; JAKEY BLUE |
| 國立臺灣大學 |
2007 |
Demand planning approaches to aggregating and forecasting interrelated demands for safety stock and backup capacity planning
|
Chen, Argon; Hsu, C.-H.; Blue, J. |
| 臺大學術典藏 |
2007 |
Demand planning approaches to aggregating and forecasting interrelated demands for safety stock and backup capacity planning
|
Chen, Argon; Hsu, C.-H.; Blue, J.; Chen, Argon; Hsu, C.-H.; Blue, J. |
