臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
南台科技大學	2001-10	Originals and effects of radical-induced re-oxidation in ultra-thin remote plasma nitrided oxides	C. H. Chen; Y. K. Fang; W. T. Hsieh; S. F. Ting; M. C. Yu; M. F. Wang; C. L. Chen; L. G. Yao; S. C. Chen; C. H. Yu; M. S. Liang;陳順智;謝文哲
南台科技大學	2001-07	The Effect of Remote Plasma Nitridation on the Integrity of the Ultrathin Gate Dielectric Films in 0. 13mm CMOS Technology and Beyond	S. F. Ting; Y. K. Fang; C. H. Chen; C. W. Yang; W. T. Hsieh; J. J. Ho; M. C. Yu; S. M. Jang; C. H. Yu; M. S. Liang; S. Chen; R. Shih;謝文哲
國立臺灣海洋大學	2001-07	The Effect of Remote Plasma Nitridation on the Integrity of the Ultrathin Gate Dielectric Films in 0.13 m CMOS Technology and Beyond	S.F. Ting; Y.K. Fang; C.H. Chen; C.W. Yang; W.T. Hsieh; J.J. Ho; M.C. Yu; S.M. Jang; C.H. Yu; M.S. Liang; S. Chen; R. Shih

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