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Showing items 21-23 of 23  (1 Page(s) Totally)
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Institution Date Title Author
臺北醫學大學 2004 High Cu Diffusion Resistance in Ultrathin Multi-quasi-amorphous CVD-Ti/TiNx Films Ou,Keng-Liang; Chiou,Shi-Yung; Lin,Ming-Hong
臺北醫學大學 2004 Nanostructured TaN(O)/TaN barrier film formed by oxygen plasma treatment for copper interconnect Ou,Keng-Liang; Lin,Ming-Hong; Chiou,Shi-Yung
臺北醫學大學 2002 Improved TaN Barrier Layer Against Cu Diffusion by Formation of an Amorphous Layer Using Plasma Treatment Ou,Keng-Liang; Wu,Wen-Fa; Chou,Chang-Pin; Chiou,Shi-Yung; Wu,Chi-Chang

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