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Institution Date Title Author
國立交通大學 2019-04-02T05:59:23Z Comparison of the diffusion barrier properties of chemical-vapor-deposited TaN and sputtered TaN between Cu and Si Tsai, MH; Sun, SC; Tsai, CE; Chuang, SH; Chiu, HT
國立交通大學 2019-04-02T05:59:15Z METALORGANIC CHEMICAL-VAPOR-DEPOSITION OF TANTALUM NITRIDE BY TERTBUTYLIMIDOTRIS(DIETHYLAMIDO)TANTALUM FOR ADVANCED METALLIZATION TSAI, MH; SUN, SC; CHIU, HT; TSAI, CE; CHUANG, SH
國立交通大學 2019-04-02T05:59:14Z GROWTH OF TERNARY SI1-X-YGEXCY THIN-FILMS FROM A SINGLE-SOURCE PRECURSOR, GE(SIME(3))(4) CHIU, HT; SHIE, SC; CHUANG, SH
國立交通大學 2019-04-02T05:58:59Z Low-temperature solution route to molybdenum nitride Chiu, HT; Chuang, SH; Lee, GH; Peng, SM
國立交通大學 2014-12-08T15:48:58Z Syntheses and characterization of organoimido complexes of niobium(V); Potential CVD precursors Chiu, HT; Lin, JC; Chuang, SH; Lee, GH; Peng, SM
國立交通大學 2014-12-08T15:47:19Z Low-temperature solution route to molybdenum nitride Chiu, HT; Chuang, SH; Lee, GH; Peng, SM
國立交通大學 2014-12-08T15:44:45Z Metal-organic CVD of tantalum oxide from tert-butylimidotris(diethylamido)tantalum and oxygen Chiu, HT; Wang, CN; Chuang, SH
國立交通大學 2014-12-08T15:43:51Z Kinetic and mechanistic studies of the chemical vapor deposition of tungsten nitride from bis(tertbutylimido)bis(tertbutylamido)tungsten Crane, EL; Chiu, HT; Nuzzo, RG
國立交通大學 2014-12-08T15:43:38Z Polygon building block route to sp(2)-carbon-based materials Lee, CY; Chiu, HT; Peng, CW; Yen, MY; Chang, YH; Liu, CS
國立交通大學 2014-12-08T15:42:31Z Metalorganic chemical vapor deposition of tungsten carbonitride films by bis(tertbutylimido)bis(diethylamido)tungsten. Chuang, SH; Chiu, HT; Chou, YH; Chang, YH; Chen, SF; Yang, JY

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