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| 國立交通大學 |
2019-04-02T05:59:23Z |
Comparison of the diffusion barrier properties of chemical-vapor-deposited TaN and sputtered TaN between Cu and Si
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Tsai, MH; Sun, SC; Tsai, CE; Chuang, SH; Chiu, HT |
| 國立交通大學 |
2019-04-02T05:59:15Z |
METALORGANIC CHEMICAL-VAPOR-DEPOSITION OF TANTALUM NITRIDE BY TERTBUTYLIMIDOTRIS(DIETHYLAMIDO)TANTALUM FOR ADVANCED METALLIZATION
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TSAI, MH; SUN, SC; CHIU, HT; TSAI, CE; CHUANG, SH |
| 國立交通大學 |
2019-04-02T05:59:14Z |
GROWTH OF TERNARY SI1-X-YGEXCY THIN-FILMS FROM A SINGLE-SOURCE PRECURSOR, GE(SIME(3))(4)
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CHIU, HT; SHIE, SC; CHUANG, SH |
| 國立交通大學 |
2019-04-02T05:58:59Z |
Low-temperature solution route to molybdenum nitride
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Chiu, HT; Chuang, SH; Lee, GH; Peng, SM |
| 國立交通大學 |
2014-12-08T15:48:58Z |
Syntheses and characterization of organoimido complexes of niobium(V); Potential CVD precursors
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Chiu, HT; Lin, JC; Chuang, SH; Lee, GH; Peng, SM |
| 國立交通大學 |
2014-12-08T15:47:19Z |
Low-temperature solution route to molybdenum nitride
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Chiu, HT; Chuang, SH; Lee, GH; Peng, SM |
| 國立交通大學 |
2014-12-08T15:44:45Z |
Metal-organic CVD of tantalum oxide from tert-butylimidotris(diethylamido)tantalum and oxygen
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Chiu, HT; Wang, CN; Chuang, SH |
| 國立交通大學 |
2014-12-08T15:43:51Z |
Kinetic and mechanistic studies of the chemical vapor deposition of tungsten nitride from bis(tertbutylimido)bis(tertbutylamido)tungsten
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Crane, EL; Chiu, HT; Nuzzo, RG |
| 國立交通大學 |
2014-12-08T15:43:38Z |
Polygon building block route to sp(2)-carbon-based materials
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Lee, CY; Chiu, HT; Peng, CW; Yen, MY; Chang, YH; Liu, CS |
| 國立交通大學 |
2014-12-08T15:42:31Z |
Metalorganic chemical vapor deposition of tungsten carbonitride films by bis(tertbutylimido)bis(diethylamido)tungsten.
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Chuang, SH; Chiu, HT; Chou, YH; Chang, YH; Chen, SF; Yang, JY |
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