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Institution Date Title Author
國立臺灣科技大學 2004 Planarization strategy of CuCMP - Interaction between plated copper thickness and removal rate Chiu, J.B.;Su, A.J.;Yu, C.C.;Shen, S.H.
國立臺灣科技大學 2003 Application of soft landing to the process control of chemical mechanical polishing Chiu, J.B.;Yu, C.C.;Shen, S.H.

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