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Showing items 1-3 of 3 (1 Page(s) Totally)
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| 國立臺灣科技大學 |
2004 |
Growth of (Ti, Zr)N films on Si by DC reactive sputtering of TiZr in N2/Ar gas mixtures - Effect of flow ratio
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Kuo, Y.L.;Lee, C.;Lin, J.C.;Peng, C.H.;Chen, L.C.;Hsieh, C.H.;Shue, S.L.;Liang, M.S.;Daniels, B.J.;Huang, C.L.;Lai, C.H. |
| 國立臺灣科技大學 |
2004 |
Diffusion of copper in titanium zirconium nitride thin films
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Kuo, Y.L.;Lee, H.H.;Lee, C.;Lin, J.C.;Shue, S.L.;Liang, M.S.;Daniels, B.J. |
| 國立臺灣科技大學 |
2003 |
Characteristics of DC reactively sputtered (Ti,Zr)N thin films as diffusion barriers for Cu metallization
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Kuo, Y.L.;Lee, C.;Lin, J.C.;Peng, C.H.;Chen, L.C.;Hsieh, C.H.;Shue, S.L.;Liang, M.S.;Daniels, B.J.;Huang, C.L.;Lai, C.H. |
Showing items 1-3 of 3 (1 Page(s) Totally)
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