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| 亞洲大學 |
2015-03 |
Nitrogen ratio and RTA optimization on sputtered TiN/SiO2/Si electrolyte-insulatoresemiconductor structure for pH sensing characteristics
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Ren, Chang;Ren, Chang;Ya, Chia-Ming;Yang, Chia-Ming;Lyu, Chengang;Lyu, Chengang;Hs, Chin-Yuan;Hsu, Chin-Yuan;Tsung-Cheng;Chen, Tsung-Cheng;Wa, Hau-Cheng;Wang, Hau-Cheng;Yang, Hao;Yang, Hao;Lin, Wei-Tse;Lin, Wei-Tse;Dorota, G.Pi;Dorota, G.Pijanowska;Wan, Jer-Chyi;Wang, Jer-Chyi;蔡宗叡;TSAI, JUNG-RUEY |
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