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Institution	Date	Title	Author
國立交通大學	2014-12-12T02:24:45Z	矽源、觸媒與化學前處理對SiCN薄膜沉積與性質之影響	林靜華; Jing-Hwa Lin; 郭正次; Dr. Cheng Tzu Kuo
國立交通大學	2014-12-12T02:20:09Z	直交實驗計畫法分析Si-C-N在矽晶蝕刻槽內和平面上之沉積	鄭啟民; Hsi-Ming Cheng; 郭正次; Dr. Cheng-Tzu Kuo

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