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國立交通大學 2014-12-12T02:20:46Z 氮化鋁鈦擴散阻障層在銅金屬化製程中熱穩定性及特性之研究 李育儒; Yu-Ru Li; 徐 瑞 坤; 歐 耿 良; Dr. Ray-Quen Hsu; Dr. Keng-Liang Ou

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