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Institution Date Title Author
國立中山大學 1998 Growth of c-axis oriented aluminum nitride films on GaAs substrates by reactive rf magnetron sputtering C.C. Cheng; Y.C. Chen; R.C. Horng; H.J. Wang; W.R. Chen; E.K. Lai
國立中山大學 1997 Growth of AIN Thin Films by Reactive RF Magnetron Sputtering and the Application to Surface Acoustic Wave Devices E.K. Lai;C.C. Cheng;W.R. Che;S.C. Lin;P.S. Cheng;Y.C. Chen

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