臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
臺大學術典藏	2018-09-10T05:27:09Z	On the sensitivity improvement and cross-correlation methodology for confocal EUV mask blank defect inspection tool fleet	Kuen-Yu Tsai; Eric M. Gullikson; Patrick Kearney; Alan R. Stivers; KUEN-YU TSAI
臺大學術典藏	2018-09-10T05:27:08Z	Modeling the defect inspection sensitivity of a confocal microscope	Eric M. Gullikson; Edita Tejnil; Kuen-Yu Tsai; Alan R. Stivers; H. Kusunose; KUEN-YU TSAI

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