臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立中山大學	2001	Etching of platinum thin films in an inductively coupled plasma	D.S. Wuu; H.H. Kuo; F.C. Liao; R.H. Horng; M.K. Lee
國立中山大學	2000	Etching Characteristics and Mechanism of Ba0.7Sr0.3TiO3 Thin Films in an Inductively Coupled Plasma	D.S. Wuu; F.C. Liao; N.H. Kuo; R.H. Horng; M.K. Lee

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