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Institution Date Title Author
臺大學術典藏 2003-06 Ultra-thin Cr2O3 Well-crystallized films for high transmittance APSM in ArF line F. D. Lai,; C. Y. Huang,; C. M. Chang,; L. A. Wang,; W. C. Cheng,; LON A. WANG
國立高雄第一科技大學 2002.04 Fabrication and characterization of aluminium oxide/chromium oxide optical superlattice for APSM at 193nm wavelength F.D.Lai;L.A.Wang
國立高雄第一科技大學 2001.09 Optical Properties of CrO/ZrO Optical Superlattice for Attenuated Phase Shifting Mask at 193nm Wavelength F.D.Lai;L.A.Wang

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