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Institution Date Title Author
國立交通大學 2020-10-05T02:01:06Z Heteroepitaxial growth and microwave plasma annealing of DC reactive sputtering deposited TiZrN film on Si (100) Chiu, Kun-An; Fu, Chia-Wei; Fang, Yu-Siang; Thi Hien Do; Shih, Fu-Han; Chang, Li
國立交通大學 2020-10-05T02:01:03Z Reactive Sputtering Deposition of Epitaxial TiC Film on Si (100) Substrate Fang, Yu-Siang; Thi Hien Do; Chiu, Kun-An; Chen, Wei-Chun; Chang, Li
國立交通大學 2019-12-13T01:10:01Z Reactive sputtering for highly oriented HfN film growth on Si (100) substrate Fang, Yu-Siang; Chiu, Kun-An; Do, Hien; Chang, Li

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