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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立成功大學 2004-01-30 Moisture resistance and thermal stability of fluorine-incorporation siloxane-based low-dielectric-constant material Cheng, Y. L.; Wang, Y. L.; Wu, Y. L.; Liu, Chuan-Pu; Liu, C. W.; Lan, J. K.; O'Neil, M. L.; Ay, Chyung; Feng, M. S.
國立成功大學 2003-01-15 Integration of a stack of two fluorine doped silicon oxide film with ULSI interconnect metallization Cheng, Y. L.; Wang, Y. L.; Liu, Chuan-Pu; Wu, Y. L.; Lo, K. Y.; Liu, C. W.; Lan, J. K.; Ay, Chyung; Feng, M. S.
國立成功大學 1999-06-22 A ULSI shallow trench isolation process through the integration of multilayered dielectric process and chemical-mechanical planarization Lin, C. F.; Tseng, Wei-Tsu; Feng, M. S.; Wang, Y. L.
國立成功大學 1999-04 Optimization of multilayer thin film passivation processes for improving cache memory device performance Lin, C. F.; Tseng, Wei-Tsu; Feng, M. S.
臺大學術典藏 1997 Yellow luminescence in n-type GaN epitaxial films Chen, H.M.;Chen, Y.F.;Lee, M.C.;Feng, M.S.; Chen, H.M.; Chen, Y.F.; Lee, M.C.; Feng, M.S.; YANG-FANG CHEN

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