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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Showing items 111-118 of 118  (3 Page(s) Totally)
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Institution Date Title Author
國立交通大學 2014-12-08T15:01:36Z Persistent photoconductivity in n-type GaN Chen, HM; Chen, YF; Lee, MC; Feng, MS
國立交通大學 2014-12-08T15:01:30Z Integration of modified plasma-enhanced chemical vapor deposited tetraethoxysilane intermetal dielectric and chemical-mechanical polishing processes for 0.35 mu m IC device reliability improvement Wang, YL; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:01:28Z Growth and characterizations of GaN on SiC substrates with buffer layers Lin, CF; Cheng, HC; Chi, GC; Feng, MS; Guo, JD; Hong, JMH; Chen, CY
國立交通大學 2014-12-08T15:01:23Z Effects of underlying films on the chemical-mechanical polishing for shallow trench isolation technology Wang, YL; Liu, C; Feng, MS; Dun, JW; Chou, KS
國立交通大學 2014-12-08T15:01:23Z Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: film chemistries, slurry formulation and polish selectivity Wang, YL; Liu, C; Chang, ST; Tsai, MS; Feng, MS; Tseng, WT
國立交通大學 2014-12-08T15:01:15Z Characterization of GaN epitaxial layers on SiC substrates with AlxGa1-xN buffer layers Lin, CF; Cheng, HC; Feng, MS; Chi, GC
國立交通大學 2014-12-08T15:01:09Z The exothermic reaction and temperature measurement for tungsten CMP technology and its application on endpoint detection Wang, YL; Liu, C; Feng, MS; Tseng, WT
國立交通大學 2014-12-08T15:01:09Z A modified multi-chemicals spray cleaning process for post-CMP cleaning application Wang, YL; Liu, C; Feng, MS; Tseng, WT

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