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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立交通大學 2014-12-08T15:01:15Z Characterization of GaN epitaxial layers on SiC substrates with AlxGa1-xN buffer layers Lin, CF; Cheng, HC; Feng, MS; Chi, GC
國立交通大學 2014-12-08T15:01:09Z The exothermic reaction and temperature measurement for tungsten CMP technology and its application on endpoint detection Wang, YL; Liu, C; Feng, MS; Tseng, WT
國立交通大學 2014-12-08T15:01:09Z A modified multi-chemicals spray cleaning process for post-CMP cleaning application Wang, YL; Liu, C; Feng, MS; Tseng, WT

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