臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立成功大學	2011-08	EUV interferometric lithography and structural characterization of an EUV diffraction grating with nondestructive spectroscopic ellipsometry	Lin, Chun-Hung; Fong, Chi-Hao; Lin, Yi-Ming; Lee, Yin-Yu; Fung, Hok-Sum; Shew, Bor-Yuan; Shieh, Jiann
國立成功大學	2010-07-15	極紫外光干涉式微影術–穿透式光柵製作及曝光平台建置	馮祺皓; Fong, Chi-Hao

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