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Institution Date Title Author
國立臺灣大學 2001-01 Structure and Elastic Properties of Amorphous SiCN Films Lehmann, G.; Hess, P.; Wu, J.-J.; Wu, C. T.; Wong, T. S.; Chen, K. H.; Chen, L. C.; Lee, H.-Y.; Amkreutz, M.; Frauenheim, Th.

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