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| 臺大學術典藏 |
2020-06-29T01:22:07Z |
The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE).
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Lin, Yu-Hsin;Cheng, Yuan-Chieh;Chu, Nien-Nan;Hsu, Wensyang;Tang, Yu-Hsiang;Chen, Po-Li;Yang, Chih-Chung;Hsiao, Ming-Hua;Hsiao, Chien-Nan; Lin, Yu-Hsin; Cheng, Yuan-Chieh; Chu, Nien-Nan; Hsu, Wensyang; Tang, Yu-Hsiang; Chen, Po-Li; Yang, Chih-Chung; Hsiao, Ming-Hua; Hsiao, Chien-Nan; CHIH-CHUNG YANG |
| 國立交通大學 |
2017-04-21T06:48:23Z |
The study of compensative structure assisted convex and concave corner structures etching by Inductively Coupled Plasma-Reactive Ion Etch (ICP-RIE)
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Lin, Yu-Hsin; Cheng, Yuan-Chieh; Chu, Nien-Nan; Hsu, Wensyang; Tang, Yu-Hsiang; Chen, Po-Li; Yang, Chih-Chung; Hsiao, Ming-Hua; Hsiao, Chien-Nan |
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