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Institution Date Title Author
國立交通大學 2014-12-08T15:16:29Z Repairing of etching-induced damage of high-k Ba0.5Sr0.5TiO3 thin films by oxygen surface plasma treatment Tsai, Kou-Chiang; Wu, Wen-Fa; Chao, Chuen-Guang; Lee, Jain-Tsai; Hsu, Jwo-Lun
國立交通大學 2014-12-08T15:13:40Z Influences of Ti, TiN, Ta and TaN layers on integration of low-k SiOC : H and Cu Tsai, Kou-Chiang; Wu, Wen-Fa; Chao, Chuen-Guang; Hsu, Jwo-Lun; Chiang, Chiu-Fen

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