臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
中原大學	1999-12-14	Method of fabricating a shallow trench isolation by using oxide/oxynitride layers	Hsu-Li Cheng;Wei-Ray Lin;鄭湘原
中原大學	1998-06-30	Method for controlling linewidth by etching bottom anti-reflective coating	Kung Linliu;Hsu-Li Cheng;Erik S. Jeng

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