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Institution Date Title Author
中原大學 2001-07-24 Method for forming self-aligned contacts using a hard mask Tzu-Shih Yen;Erik S. Jeng;Hao-Chieh Liu;Hung-Yi Luo
中原大學 2000-11-21 Method of forming a cob dram by using self-aligned node and bit line contact plug Hung-Yi Luo;Erik S. Jeng;Yue-Feng Chen
中原大學 2000-09-26 Method for fabricating ultra-small interconnections using simplified patterns and sidewall contact plugs Erik S. Jeng;Tzu-Shih Yen;Hung-Yi Luo
中原大學 2000-03-07 Method of fabricating sidewall spacers for a self-aligned contact hole Erik S. Jeng;Hung-Yi Luo;Yue-Feng Chen;Ming-Horn Tsai
中原大學 1999-04-20 Method for fabricating dynamic random access memory (DRAM) by simultaneous formation of tungsten bit lines and tungsten landing plug contacts Hung-Yi Luo;鄭湘原

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