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Institution Date Title Author
中原大學 2002-04-23 Multiple etch contact etching method incorporating post contact etch etching Tzu-Shih Yen;Erik S. Jeng;I-Ping Lee;Eddy Chiang
中原大學 2000-06-06 Method for simultaneously fabricating a DRAM capacitor and metal interconnections Fu-Liang Yang;Erik S. Jeng;Bih-Tiao Lin;I-Ping Lee
中原大學 2000-05-02 Method for etching a metal layer with dimensional control I-Ping Lee;Erik S. Jeng;Chyei-Jer Hsieh
中原大學 1999-10-19 Method of dry etching A1Cu using SiN hard mask I-Ping Lee;鄭湘原

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