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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立交通大學 2014-12-08T15:43:50Z One-step cleaning solution to replace the conventional RCA two-step cleaning recipe for pregate oxide cleaning Pan, TM; Lei, TF; Chao, TS; Liaw, MC; Ko, FH; Lu, CP
國立交通大學 2014-12-08T15:43:18Z Comparison of novel cleaning solutions, with various chelating agents for post-CMP cleaning on poly-Si film Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chiu, TH; Lee, YH; Lu, CP
國立交通大學 2014-12-08T15:42:23Z Performance evaluation of cleaning solutions enhanced with tetraalkylammonium hydroxide substituents for post-CMP cleaning on poly-Si film Pan, TM; Lei, TF; Ko, FH; Chao, TS; Liaw, MC; Lee, YH; Lu, CP
國立交通大學 2014-12-08T15:40:48Z Mechanism and modeling of ring pattern formation for electron beam exposure on Zwitterresist Chen, JK; Ko, FH; Chen, HL; Chang, FC
國立交通大學 2014-12-08T15:39:00Z Fabrication of sub-60-nm contact holes in silicon dioxide layers Ko, FH; You, HC; Chu, TC; Lei, TF; Hsu, CC; Chen, HL
國立交通大學 2014-12-08T15:38:47Z Novel one-step aqueous solutions to replace pregate oxide cleans Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chin, TH; Lu, CP
國立交通大學 2014-12-08T15:37:23Z Effect of fluoroalkyl substituents on the reactions of alkylchlorosilanes with mold surfaces for nanoimprint lithography Chen, JK; Ko, FH; Hsieh, KF; Chou, CT; Chang, FC
國立交通大學 2014-12-08T15:37:18Z Behavior and surface energies of polybenzoxazines formed by polymerization with argon, oxygen, and hydrogen plasmas Chen, JK; Lin, IK; Ko, FH; Huang, CF; Chen, KS; Chan, CH; Chang, FC
國立交通大學 2014-12-08T15:37:17Z Probing the microwave degradation mechanism of phenol-containing polymeric compounds by sample pretreatment and GC-MS analysis Chang, YC; Ko, FH; Ko, CJ; Chu, TC
國立交通大學 2014-12-08T15:36:25Z Purification of multi-walled carbon nanotubes through microwave heating of nitric acid in a closed vessel Ko, FH; Lee, CY; Ko, CJ; Chu, TC

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