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國立交通大學 2020-07-01T05:21:18Z Nitride Induced Stress Affecting Crystallinity of Sidewall Damascene Gate-All-Around Nanowire Poly-Si FETs Shen, Chuan-Hui; Chen, Wei-Yen; Lee, Shen-Yang; Ku, Po-Yi; Chao, Tien-Sheng

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