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Showing items 121-145 of 313  (13 Page(s) Totally)
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Institution Date Title Author
臺大學術典藏 2018-09-10T09:25:00Z New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints Hoi-Tou Ng;Yu-Tian Shen;Sheng-Yung Chen;Chun-Hung Liu;Philip C. W. Ng;Kuen-Yu Tsai; Hoi-Tou Ng; Yu-Tian Shen; Sheng-Yung Chen; Chun-Hung Liu; Philip C. W. Ng; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints Hoi-Tou Ng;Yu-Tian Shen;Sheng-Yung Chen;Chun-Hung Liu;Philip C. W. Ng;Kuen-Yu Tsai; Hoi-Tou Ng; Yu-Tian Shen; Sheng-Yung Chen; Chun-Hung Liu; Philip C. W. Ng; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Direct-scatterometry-enabled lithography model calibration Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Direct-scatterometry-enabled lithography model calibration Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Direct-scatterometry-enabled lithography model calibration Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Architecture and EOS Design Flow of a Multiple-Electron-Beam–Direct-Write System Considering Patterning Fidelity, Breakdown Effect Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Architecture and EOS Design Flow of a Multiple-Electron-Beam–Direct-Write System Considering Patterning Fidelity, Breakdown Effect Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Architecture and EOS Design Flow of a Multiple-Electron-Beam–Direct-Write System Considering Patterning Fidelity, Breakdown Effect Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Study of etching bias modeling and correction strategies for patterning processes Philip C.W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C.W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Study of etching bias modeling and correction strategies for patterning processes Philip C.W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C.W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Study of etching bias modeling and correction strategies for patterning processes Philip C.W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C.W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z The effect of NBTI on 3D integrated circuits Cheng-Hong Lin;Yi-Chang Lu;Chin-Khai Tang;Kuen-Yu Tsai; Cheng-Hong Lin; Yi-Chang Lu; Chin-Khai Tang; Kuen-Yu Tsai; YI-CHANG LU; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z The effect of NBTI on 3D integrated circuits Cheng-Hong Lin;Yi-Chang Lu;Chin-Khai Tang;Kuen-Yu Tsai; Cheng-Hong Lin; Yi-Chang Lu; Chin-Khai Tang; Kuen-Yu Tsai; YI-CHANG LU; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z The effect of NBTI on 3D integrated circuits Cheng-Hong Lin;Yi-Chang Lu;Chin-Khai Tang;Kuen-Yu Tsai; Cheng-Hong Lin; Yi-Chang Lu; Chin-Khai Tang; Kuen-Yu Tsai; YI-CHANG LU; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:24:59Z New parametric point spread function calibration methodology for improving the accuracy of patterning prediction in electron-beam lithography Chun-Hung Liu;Hoi-Tou Ng;Kuen-Yu Tsai; Chun-Hung Liu; Hoi-Tou Ng; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:24:59Z New parametric point spread function calibration methodology for improving the accuracy of patterning prediction in electron-beam lithography Chun-Hung Liu;Hoi-Tou Ng;Kuen-Yu Tsai; Chun-Hung Liu; Hoi-Tou Ng; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:24:59Z New parametric point spread function calibration methodology for improving the accuracy of patterning prediction in electron-beam lithography Chun-Hung Liu;Hoi-Tou Ng;Kuen-Yu Tsai; Chun-Hung Liu; Hoi-Tou Ng; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Method For Non-Resist Nanolithography Miin-Jang Chen;Kuen-Yu Tsai;Chee-Wee Liu; Miin-Jang Chen; Kuen-Yu Tsai; Chee-Wee Liu; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Method For Non-Resist Nanolithography Miin-Jang Chen;Kuen-Yu Tsai;Chee-Wee Liu; Miin-Jang Chen; Kuen-Yu Tsai; Chee-Wee Liu; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Method For Non-Resist Nanolithography Miin-Jang Chen;Kuen-Yu Tsai;Chee-Wee Liu; Miin-Jang Chen; Kuen-Yu Tsai; Chee-Wee Liu; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Charged-Particle-Beam Patterning Without Resist Kuen-Yu Tsai;Miin-Jang Chen;Samuel C. Pan; Kuen-Yu Tsai; Miin-Jang Chen; Samuel C. Pan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Charged-Particle-Beam Patterning Without Resist Kuen-Yu Tsai;Miin-Jang Chen;Samuel C. Pan; Kuen-Yu Tsai; Miin-Jang Chen; Samuel C. Pan; KUEN-YU TSAI

Showing items 121-145 of 313  (13 Page(s) Totally)
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