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Taiwan Academic Institutional Repository >
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"kuen yu tsai"
Showing items 6-15 of 313 (32 Page(s) Totally)
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| 臺大學術典藏 |
2022-01-03T08:01:17Z |
Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write
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Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; JIA-HAN LI |
| 臺大學術典藏 |
2022-01-03T08:01:15Z |
Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images
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Yen-Min Lee; Jia-Han Li*; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Alek C. Chen; JIA-HAN LI |
| 臺大學術典藏 |
2022-01-03T08:01:14Z |
Solution-refined method for solving large-scale computation problems: Taking the Laplace’s equation as an example
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Yen-Min Lee; Jia-Han Li*; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; JIA-HAN LI |
| 臺大學術典藏 |
2022-01-03T08:01:13Z |
Solution-refined method for solving large-scale electrostatic problems: Taking the electron-beam direct-write lithography system as an example
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Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yu Yen; JIA-HAN LI |
| 臺大學術典藏 |
2022-01-03T08:01:10Z |
A new EUV mask blank defect inspection method with coherent diffraction imaging
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Ding Qi; Kuen-Yu Tsai; Jia-Han Li; JIA-HAN LI |
| 臺大學術典藏 |
2022-01-03T08:01:08Z |
Supplementary zones-surrounded Fresnel zone plate
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Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; Jia-Han Li^*; JIA-HAN LI |
| 臺大學術典藏 |
2022-01-03T08:00:58Z |
Precision fabrication of EUVL programmed defects with helium ion beam patterning
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Chien-Lin Lee; Jia-Syun Cai; Sheng-Wei Chien; Kuen-Yu Tsai*; Jia-Han Li; Chao-Te Lee; JIA-HAN LI |
| 臺大學術典藏 |
2021-10-21T23:27:35Z |
Efficient electrical characteristics estimation techniques for sub-20-nm FDSOI integrated circuits with nonrectangular gate patterning effects
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Cai, Jia Syun; Chien, Sheng Wei; Zheng, Xin Yang; Lee, Chien Lin; KUEN-YU TSAI |
| 臺大學術典藏 |
2021-10-21T23:27:35Z |
Investigation on helium ion beam lithography with proximity effect correction
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Lee, Chien Lin; Chien, Sheng Wei; KUEN-YU TSAI; Liu, Chun Hung |
| 臺大學術典藏 |
2021-07-21T23:20:52Z |
Precision fabrication of EUVL programmed defects with helium ion beam patterning
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Lee, Chien Lin; Cai, Jia Syun; Chien, Sheng Wei; KUEN-YU TSAI; JIA-HAN LI; Lee, Chao Te |
Showing items 6-15 of 313 (32 Page(s) Totally)
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