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Showing items 76-85 of 313  (32 Page(s) Totally)
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Institution Date Title Author
臺大學術典藏 2018-09-10T15:00:24Z Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Electron-Beam Lithographic Method, System and Method For Controlling Electron-Beam Servo (電子束微影方法、電子束微影伺服控制方法及系統) Jia-Yush Yen;Kuen-Yu Tsai;Lien-Sheng Chen;Pablo Chiu;Hsin-Fan Tsai; Jia-Yush Yen; Kuen-Yu Tsai; Lien-Sheng Chen; Pablo Chiu; Hsin-Fan Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Electron-Beam Lithographic Method, System and Method For Controlling Electron-Beam Servo (電子束微影方法、電子束微影伺服控制方法及系統) Jia-Yush Yen;Kuen-Yu Tsai;Lien-Sheng Chen;Pablo Chiu;Hsin-Fan Tsai; Jia-Yush Yen; Kuen-Yu Tsai; Lien-Sheng Chen; Pablo Chiu; Hsin-Fan Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Electron-Beam Lithographic Method, System and Method For Controlling Electron-Beam Servo (電子束微影方法、電子束微影伺服控制方法及系統) Jia-Yush Yen;Kuen-Yu Tsai;Lien-Sheng Chen;Pablo Chiu;Hsin-Fan Tsai; Jia-Yush Yen; Kuen-Yu Tsai; Lien-Sheng Chen; Pablo Chiu; Hsin-Fan Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Apparatus and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變之估測裝置及其方法) Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Apparatus and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變之估測裝置及其方法) Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Apparatus and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變之估測裝置及其方法) Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI

Showing items 76-85 of 313  (32 Page(s) Totally)
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