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机构	日期	题名	作者
臺大學術典藏	2018-09-10T06:02:39Z	Feedback control of piezo-based nanopositioning systems for semiconductor manufacturing	Kuen-Yu Tsai; Jia-Yush Yen; Arthur Tay; Jyh-Fa Lee; KUEN-YU TSAI; Yea-Chin Yeh; Chun-Hung Liu
臺大學術典藏	2018-09-10T06:02:39Z	Feedback control of piezo-based nanopositioning systems for semiconductor manufacturing	Kuen-Yu Tsai; Jia-Yush Yen; Arthur Tay; Jyh-Fa Lee; KUEN-YU TSAI; Yea-Chin Yeh; Chun-Hung Liu
臺大學術典藏	2018-09-10T05:27:09Z	In-situ fault detection of wafer warpage in lithography	Arthur Tay; Weng Khuen Ho; Christopher Yap; Chen Wei; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T05:27:09Z	In-situ fault detection of wafer warpage in lithography	Arthur Tay; Weng Khuen Ho; Christopher Yap; Chen Wei; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T05:27:09Z	On the sensitivity improvement and cross-correlation methodology for confocal EUV mask blank defect inspection tool fleet	Kuen-Yu Tsai; Eric M. Gullikson; Patrick Kearney; Alan R. Stivers; KUEN-YU TSAI
臺大學術典藏	2018-09-10T05:27:09Z	On the sensitivity improvement and cross-correlation methodology for confocal EUV mask blank defect inspection tool fleet	Kuen-Yu Tsai; Eric M. Gullikson; Patrick Kearney; Alan R. Stivers; KUEN-YU TSAI
臺大學術典藏	2018-09-10T05:27:08Z	Modeling the defect inspection sensitivity of a confocal microscope	Eric M. Gullikson; Edita Tejnil; Kuen-Yu Tsai; Alan R. Stivers; H. Kusunose; KUEN-YU TSAI
臺大學術典藏	2018-09-10T05:27:08Z	Modeling the defect inspection sensitivity of a confocal microscope	Eric M. Gullikson; Edita Tejnil; Kuen-Yu Tsai; Alan R. Stivers; H. Kusunose; KUEN-YU TSAI
臺大學術典藏	2018-09-10T04:59:22Z	Design of feedforward filters for improving tracking performances of existing feedback control systems	Kuen-Yu Tsai; Charles D. Schaper; Thomas Kailath; KUEN-YU TSAI
臺大學術典藏	2018-09-10T04:59:22Z	Design of feedforward filters for improving tracking performances of existing feedback control systems	Kuen-Yu Tsai; Charles D. Schaper; Thomas Kailath; KUEN-YU TSAI
臺大學術典藏	2018-09-10T04:59:22Z	DQIT: μ-synthesis without D-scale fitting	Kuen-Yu Tsai*; Haitham A. Hindi; KUEN-YU TSAI
臺大學術典藏	2018-09-10T04:59:22Z	DQIT: μ-synthesis without D-scale fitting	Kuen-Yu Tsai*; Haitham A. Hindi; KUEN-YU TSAI
臺大學術典藏	2018-09-10T04:59:22Z	Method for Design of Multi-objective Robust Controllers	Kuen-Yu Tsai; Haitham A. Hindi; KUEN-YU TSAI
臺大學術典藏	2018-09-10T04:59:22Z	Method for Design of Multi-objective Robust Controllers	Kuen-Yu Tsai; Haitham A. Hindi; KUEN-YU TSAI
臺大學術典藏	2018-09-10T04:15:19Z	Design of Feedforward and Feedback Controllers by Signal Processing and Convex Optimization Techniques	Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T04:15:19Z	Design of Feedforward and Feedback Controllers by Signal Processing and Convex Optimization Techniques	Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018	Focused helium ion beam applications in advanced-node nanolithography R/D	Kuen-Yu Tsai; KUEN-YU TSAI; Sheng-Wei Chien; Chien-Lin Lee; KUEN-YU TSAI;Kuen-Yu Tsai;Sheng-Wei Chien;Chien-Lin Lee
臺大學術典藏	2018	Focused helium ion beam applications in advanced-node nanolithography R/D	Kuen-Yu Tsai; KUEN-YU TSAI; Sheng-Wei Chien; Chien-Lin Lee; KUEN-YU TSAI;Kuen-Yu Tsai;Sheng-Wei Chien;Chien-Lin Lee
臺大學術典藏	2018	Focused helium ion beam applications in advanced-node nanolithography R/D	Kuen-Yu Tsai; KUEN-YU TSAI; Sheng-Wei Chien; Chien-Lin Lee; KUEN-YU TSAI;Kuen-Yu Tsai;Sheng-Wei Chien;Chien-Lin Lee
臺大學術典藏	2018	Focused helium ion beam applications in advanced-node nanolithography R/D	Kuen-Yu Tsai; KUEN-YU TSAI; Sheng-Wei Chien; Chien-Lin Lee; KUEN-YU TSAI;Kuen-Yu Tsai;Sheng-Wei Chien;Chien-Lin Lee
臺大學術典藏	2015-07	Determining Proximity Effect Parameters for Non-Rectangular Semiconductor Structures	KUEN-YU TSAI; Yi-Chang Lu; Meng-Fu You; Kuen-Yu Tsai; Kuen-Yu Tsai;Meng-Fu You;Yi-Chang Lu
臺大學術典藏	2015-07	Determining Proximity Effect Parameters for Non-Rectangular Semiconductor Structures	KUEN-YU TSAI; Yi-Chang Lu; Meng-Fu You; Kuen-Yu Tsai; Kuen-Yu Tsai;Meng-Fu You;Yi-Chang Lu
臺大學術典藏	2015-07	Determining Proximity Effect Parameters for Non-Rectangular Semiconductor Structures	KUEN-YU TSAI; Yi-Chang Lu; Meng-Fu You; Kuen-Yu Tsai; Kuen-Yu Tsai;Meng-Fu You;Yi-Chang Lu
臺大學術典藏	2014-05	Method for Compensating Proximity Effect of Particle Beam Lithography Process (粒子束微影程序鄰近效應之補償方法)	KUEN-YU TSAI; Pei-Lin Tien; Chooi-Wan Ng; Chun-Hung Liu; Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai
臺大學術典藏	2014-05	Method for Compensating Proximity Effect of Particle Beam Lithography Process (粒子束微影程序鄰近效應之補償方法)	KUEN-YU TSAI; Pei-Lin Tien; Chooi-Wan Ng; Chun-Hung Liu; Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai

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