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機構	日期	題名	作者
臺大學術典藏	2018-09-10T15:00:24Z	Method and Apparatus For Designing Patterning Systems Considering Patterning Fidelity (基於圖案製作真確度之圖案製作系統設計方法與裝置)	Kuen-Yu Tsai;Sheng-Yung Chen;Hoi-Tou Ng;Shiau-Yi Ma; Kuen-Yu Tsai; Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Study of etching bias modeling and correction strategies for compensation of patterning process effects	Philip C. W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C. W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Study of etching bias modeling and correction strategies for compensation of patterning process effects	Philip C. W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C. W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Study of etching bias modeling and correction strategies for compensation of patterning process effects	Philip C. W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C. W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation	Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation	Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation	Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Direct-scatterometry-enabled optical-proximity-correction-model calibration	Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Direct-scatterometry-enabled optical-proximity-correction-model calibration	Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Direct-scatterometry-enabled optical-proximity-correction-model calibration	Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Method for Improving Accuracy of Parasitics Extraction Considering Sub-Wavelength Lithography Effects	KUEN-YU TSAI; Kuen-Yu Tsai;Wei-Jhih Hsieh;Bo-Sen Chang; Kuen-Yu Tsai; Wei-Jhih Hsieh; Bo-Sen Chang
臺大學術典藏	2018-09-10T09:50:34Z	Method for Improving Accuracy of Parasitics Extraction Considering Sub-Wavelength Lithography Effects	KUEN-YU TSAI; Kuen-Yu Tsai;Wei-Jhih Hsieh;Bo-Sen Chang; Kuen-Yu Tsai; Wei-Jhih Hsieh; Bo-Sen Chang
臺大學術典藏	2018-09-10T09:50:34Z	Method for Improving Accuracy of Parasitics Extraction Considering Sub-Wavelength Lithography Effects	KUEN-YU TSAI; Kuen-Yu Tsai;Wei-Jhih Hsieh;Bo-Sen Chang; Kuen-Yu Tsai; Wei-Jhih Hsieh; Bo-Sen Chang
臺大學術典藏	2018-09-10T09:50:34Z	Method and Apparatus for Designing Patterning System Based on Patterning Fidelity	Kuen-Yu Tsai;Sheng-Yung Chen;Hoi-Tou Ng;Shiau-Yi Ma; Kuen-Yu Tsai; Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Method and Apparatus for Designing Patterning System Based on Patterning Fidelity	Kuen-Yu Tsai;Sheng-Yung Chen;Hoi-Tou Ng;Shiau-Yi Ma; Kuen-Yu Tsai; Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Method and Apparatus for Designing Patterning System Based on Patterning Fidelity	Kuen-Yu Tsai;Sheng-Yung Chen;Hoi-Tou Ng;Shiau-Yi Ma; Kuen-Yu Tsai; Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Electron Beam Exposure Apparatus, Electron Beam Generation Apparatus and Exposure Method (電子束曝光裝置、電子束產生裝置及曝光方法)	Kuen-Yu Tsai; KUEN-YU TSAI; Yu-Hsuan Kuo;Ming-Shing Su;Yi-Chang Lu;Kuen-Yu Tsai; Yu-Hsuan Kuo; Ming-Shing Su; Yi-Chang Lu
臺大學術典藏	2018-09-10T09:50:34Z	Electron Beam Exposure Apparatus, Electron Beam Generation Apparatus and Exposure Method (電子束曝光裝置、電子束產生裝置及曝光方法)	Kuen-Yu Tsai; KUEN-YU TSAI; Yu-Hsuan Kuo;Ming-Shing Su;Yi-Chang Lu;Kuen-Yu Tsai; Yu-Hsuan Kuo; Ming-Shing Su; Yi-Chang Lu
臺大學術典藏	2018-09-10T09:50:34Z	Electron Beam Exposure Apparatus, Electron Beam Generation Apparatus and Exposure Method (電子束曝光裝置、電子束產生裝置及曝光方法)	Kuen-Yu Tsai; KUEN-YU TSAI; Yu-Hsuan Kuo;Ming-Shing Su;Yi-Chang Lu;Kuen-Yu Tsai; Yu-Hsuan Kuo; Ming-Shing Su; Yi-Chang Lu
臺大學術典藏	2018-09-10T09:50:34Z	Method for Compensating Proximity Effects of Particle Beam Lithography Processes	Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai; Chun-Hung Liu; Chooi-Wan Ng; Pei-Lin Tien; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Method for Compensating Proximity Effects of Particle Beam Lithography Processes	Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai; Chun-Hung Liu; Chooi-Wan Ng; Pei-Lin Tien; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Method for Compensating Proximity Effects of Particle Beam Lithography Processes	Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai; Chun-Hung Liu; Chooi-Wan Ng; Pei-Lin Tien; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Method for Compensating Effect of Patterning Process and Apparatus Thereof	Yi-Sheng Su; KUEN-YU TSAI; Kuen-Yu Tsai; Chooi-Wan Ng; Kuen-Yu Tsai;Chooi-Wan Ng;Yi-Sheng Su
臺大學術典藏	2018-09-10T09:50:34Z	Method for Compensating Effect of Patterning Process and Apparatus Thereof	Yi-Sheng Su; KUEN-YU TSAI; Kuen-Yu Tsai; Chooi-Wan Ng; Kuen-Yu Tsai;Chooi-Wan Ng;Yi-Sheng Su
臺大學術典藏	2018-09-10T09:50:34Z	Method for Compensating Effect of Patterning Process and Apparatus Thereof	Yi-Sheng Su; KUEN-YU TSAI; Kuen-Yu Tsai; Chooi-Wan Ng; Kuen-Yu Tsai;Chooi-Wan Ng;Yi-Sheng Su

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