臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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機構	日期	題名	作者
臺大學術典藏	2018-09-10T07:42:07Z	Manufacturability analysis of a MEMS-based electron-optical system design for direct-write lithography	Sheng-Yung Chen;Shin-Chuan Chen;Hsing-Hong Chen;Ting-Han Pei;Kuen-Yu Tsai;Hsin-Hung Pan; Sheng-Yung Chen; Shin-Chuan Chen; Hsing-Hong Chen; Ting-Han Pei; Kuen-Yu Tsai; Hsin-Hung Pan; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	A new parametric proximity effect model calibration method for improving accuracy of post-lithography patterning prediction in sub-32-nm half-pitch low-voltage electron beam direct-write lithography	Chun-Hung Liu;Hoi-Tou Ng;Kuen-Yu Tsai; Chun-Hung Liu; Hoi-Tou Ng; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	A new parametric proximity effect model calibration method for improving accuracy of post-lithography patterning prediction in sub-32-nm half-pitch low-voltage electron beam direct-write lithography	Chun-Hung Liu;Hoi-Tou Ng;Kuen-Yu Tsai; Chun-Hung Liu; Hoi-Tou Ng; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	A new parametric proximity effect model calibration method for improving accuracy of post-lithography patterning prediction in sub-32-nm half-pitch low-voltage electron beam direct-write lithography	Chun-Hung Liu;Hoi-Tou Ng;Kuen-Yu Tsai; Chun-Hung Liu; Hoi-Tou Ng; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	A simple design rule check for DP decomposition	Chih-Hsien Tang;Kuen-Yu Tsai; Chih-Hsien Tang; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	A simple design rule check for DP decomposition	Chih-Hsien Tang;Kuen-Yu Tsai; Chih-Hsien Tang; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	A simple design rule check for DP decomposition	Chih-Hsien Tang;Kuen-Yu Tsai; Chih-Hsien Tang; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	Effects of Fresnel zone plate fabrication errors on focusing performances	Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	Effects of Fresnel zone plate fabrication errors on focusing performances	Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:42:06Z	Effects of Fresnel zone plate fabrication errors on focusing performances	Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI

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