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機構	日期	題名	作者
臺大學術典藏	2018-09-10T07:08:40Z	A new method to improve accuracy of leakage current estimation for transistors with non-rectangular gates due to sub-wavelength lithography effects	Meng-Fu You; Yi-Chang Lu; Philip C. W. Ng; YI-CHANG LU; KUEN-YU TSAI; Kuen-Yu Tsai;Meng-Fu You;Yi-Chang Lu;Philip C. W. Ng; Kuen-Yu Tsai
臺大學術典藏	2018-09-10T07:08:40Z	A new method to improve accuracy of leakage current estimation for transistors with non-rectangular gates due to sub-wavelength lithography effects	Meng-Fu You; Yi-Chang Lu; Philip C. W. Ng; YI-CHANG LU; KUEN-YU TSAI; Kuen-Yu Tsai;Meng-Fu You;Yi-Chang Lu;Philip C. W. Ng; Kuen-Yu Tsai
臺大學術典藏	2018-09-10T07:08:40Z	A new method to improve accuracy of leakage current estimation for transistors with non-rectangular gates due to sub-wavelength lithography effects	Meng-Fu You; Yi-Chang Lu; Philip C. W. Ng; YI-CHANG LU; KUEN-YU TSAI; Kuen-Yu Tsai;Meng-Fu You;Yi-Chang Lu;Philip C. W. Ng; Kuen-Yu Tsai
臺大學術典藏	2018-09-10T07:08:40Z	A novel curve-fitting procedure for determining proximity effect parameters in electron beam lithography	Chun-Hung Liu;Hoi-Tou Ng;Philip C. W. Ng;Kuen-Yu Tsai;Shy-Jay Lin;Jeng-Horng Chen; Chun-Hung Liu; Hoi-Tou Ng; Philip C. W. Ng; Kuen-Yu Tsai; Shy-Jay Lin; Jeng-Horng Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:08:40Z	A novel curve-fitting procedure for determining proximity effect parameters in electron beam lithography	Chun-Hung Liu;Hoi-Tou Ng;Philip C. W. Ng;Kuen-Yu Tsai;Shy-Jay Lin;Jeng-Horng Chen; Chun-Hung Liu; Hoi-Tou Ng; Philip C. W. Ng; Kuen-Yu Tsai; Shy-Jay Lin; Jeng-Horng Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T07:08:40Z	A novel curve-fitting procedure for determining proximity effect parameters in electron beam lithography	Chun-Hung Liu;Hoi-Tou Ng;Philip C. W. Ng;Kuen-Yu Tsai;Shy-Jay Lin;Jeng-Horng Chen; Chun-Hung Liu; Hoi-Tou Ng; Philip C. W. Ng; Kuen-Yu Tsai; Shy-Jay Lin; Jeng-Horng Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:35:26Z	Real-time spatial control of photoresist development rate	Arthur Tay; Weng-Khuen Ho; Ni Hu; Choon-Meng Kiew; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:35:26Z	Real-time spatial control of photoresist development rate	Arthur Tay; Weng-Khuen Ho; Ni Hu; Choon-Meng Kiew; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:35:26Z	Servo System Design of a High-Resolution Piezo-Driven Three Degree-of-Freedom Fine Stage for Integrated-Circuit Wafer Step-and-Repeat Lithography Systems	Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:35:26Z	Servo System Design of a High-Resolution Piezo-Driven Three Degree-of-Freedom Fine Stage for Integrated-Circuit Wafer Step-and-Repeat Lithography Systems	Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:35:25Z	Impacts of optical proximity correction settings on electrical performances	Meng-Fu You; Philip C. W. Ng; Yi-Sheng Su; Kuen-Yu Tsai; Yi-Chang Lu; YI-CHANG LU; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:35:25Z	Impacts of optical proximity correction settings on electrical performances	Meng-Fu You; Philip C. W. Ng; Yi-Sheng Su; Kuen-Yu Tsai; Yi-Chang Lu; YI-CHANG LU; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:40Z	Method for Fast Design of Multi-objective Frequency-shaping Equalizers	Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:40Z	Method for Fast Design of Multi-objective Frequency-shaping Equalizers	Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography	Ni Hu; Arthur Tay; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography	Ni Hu; Arthur Tay; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography	Arthur Tay; Weng-Khuen Ho; Ni Hu; Kuen-Yu Tsai; Ying Zhou; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography	Arthur Tay; Weng-Khuen Ho; Ni Hu; Kuen-Yu Tsai; Ying Zhou; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	Identifications of the PZT Actuated Novel Optical Scanning System	Yea-Chin Yeh; Chun-Hung Liu; Kuen-Yu Tsai; Yu-Chen Kung; Jia-Yush Yen; Jyh-Fa Lee; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	Identifications of the PZT Actuated Novel Optical Scanning System	Yea-Chin Yeh; Chun-Hung Liu; Kuen-Yu Tsai; Yu-Chen Kung; Jia-Yush Yen; Jyh-Fa Lee; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	Feedback control of piezo-based nanopositioning systems for semiconductor manufacturing	Kuen-Yu Tsai; Jia-Yush Yen; Arthur Tay; Jyh-Fa Lee; KUEN-YU TSAI; Yea-Chin Yeh; Chun-Hung Liu
臺大學術典藏	2018-09-10T06:02:39Z	Feedback control of piezo-based nanopositioning systems for semiconductor manufacturing	Kuen-Yu Tsai; Jia-Yush Yen; Arthur Tay; Jyh-Fa Lee; KUEN-YU TSAI; Yea-Chin Yeh; Chun-Hung Liu
臺大學術典藏	2018-09-10T05:27:09Z	In-situ fault detection of wafer warpage in lithography	Arthur Tay; Weng Khuen Ho; Christopher Yap; Chen Wei; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T05:27:09Z	In-situ fault detection of wafer warpage in lithography	Arthur Tay; Weng Khuen Ho; Christopher Yap; Chen Wei; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T05:27:09Z	On the sensitivity improvement and cross-correlation methodology for confocal EUV mask blank defect inspection tool fleet	Kuen-Yu Tsai; Eric M. Gullikson; Patrick Kearney; Alan R. Stivers; KUEN-YU TSAI

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