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Showing items 271-295 of 313  (13 Page(s) Totally)
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Institution Date Title Author
臺大學術典藏 2018-09-10T07:08:40Z A novel curve-fitting procedure for determining proximity effect parameters in electron beam lithography Chun-Hung Liu;Hoi-Tou Ng;Philip C. W. Ng;Kuen-Yu Tsai;Shy-Jay Lin;Jeng-Horng Chen; Chun-Hung Liu; Hoi-Tou Ng; Philip C. W. Ng; Kuen-Yu Tsai; Shy-Jay Lin; Jeng-Horng Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:35:26Z Real-time spatial control of photoresist development rate Arthur Tay; Weng-Khuen Ho; Ni Hu; Choon-Meng Kiew; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:35:26Z Real-time spatial control of photoresist development rate Arthur Tay; Weng-Khuen Ho; Ni Hu; Choon-Meng Kiew; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:35:26Z Servo System Design of a High-Resolution Piezo-Driven Three Degree-of-Freedom Fine Stage for Integrated-Circuit Wafer Step-and-Repeat Lithography Systems Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:35:26Z Servo System Design of a High-Resolution Piezo-Driven Three Degree-of-Freedom Fine Stage for Integrated-Circuit Wafer Step-and-Repeat Lithography Systems Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:35:25Z Impacts of optical proximity correction settings on electrical performances Meng-Fu You; Philip C. W. Ng; Yi-Sheng Su; Kuen-Yu Tsai; Yi-Chang Lu; YI-CHANG LU; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:35:25Z Impacts of optical proximity correction settings on electrical performances Meng-Fu You; Philip C. W. Ng; Yi-Sheng Su; Kuen-Yu Tsai; Yi-Chang Lu; YI-CHANG LU; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:40Z Method for Fast Design of Multi-objective Frequency-shaping Equalizers Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:40Z Method for Fast Design of Multi-objective Frequency-shaping Equalizers Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:39Z A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography Ni Hu; Arthur Tay; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:39Z A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography Ni Hu; Arthur Tay; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:39Z Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography Arthur Tay; Weng-Khuen Ho; Ni Hu; Kuen-Yu Tsai; Ying Zhou; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:39Z Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography Arthur Tay; Weng-Khuen Ho; Ni Hu; Kuen-Yu Tsai; Ying Zhou; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:39Z Identifications of the PZT Actuated Novel Optical Scanning System Yea-Chin Yeh; Chun-Hung Liu; Kuen-Yu Tsai; Yu-Chen Kung; Jia-Yush Yen; Jyh-Fa Lee; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:39Z Identifications of the PZT Actuated Novel Optical Scanning System Yea-Chin Yeh; Chun-Hung Liu; Kuen-Yu Tsai; Yu-Chen Kung; Jia-Yush Yen; Jyh-Fa Lee; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:02:39Z Feedback control of piezo-based nanopositioning systems for semiconductor manufacturing Kuen-Yu Tsai; Jia-Yush Yen; Arthur Tay; Jyh-Fa Lee; KUEN-YU TSAI; Yea-Chin Yeh; Chun-Hung Liu
臺大學術典藏 2018-09-10T06:02:39Z Feedback control of piezo-based nanopositioning systems for semiconductor manufacturing Kuen-Yu Tsai; Jia-Yush Yen; Arthur Tay; Jyh-Fa Lee; KUEN-YU TSAI; Yea-Chin Yeh; Chun-Hung Liu
臺大學術典藏 2018-09-10T05:27:09Z In-situ fault detection of wafer warpage in lithography Arthur Tay; Weng Khuen Ho; Christopher Yap; Chen Wei; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T05:27:09Z In-situ fault detection of wafer warpage in lithography Arthur Tay; Weng Khuen Ho; Christopher Yap; Chen Wei; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T05:27:09Z On the sensitivity improvement and cross-correlation methodology for confocal EUV mask blank defect inspection tool fleet Kuen-Yu Tsai; Eric M. Gullikson; Patrick Kearney; Alan R. Stivers; KUEN-YU TSAI
臺大學術典藏 2018-09-10T05:27:09Z On the sensitivity improvement and cross-correlation methodology for confocal EUV mask blank defect inspection tool fleet Kuen-Yu Tsai; Eric M. Gullikson; Patrick Kearney; Alan R. Stivers; KUEN-YU TSAI
臺大學術典藏 2018-09-10T05:27:08Z Modeling the defect inspection sensitivity of a confocal microscope Eric M. Gullikson; Edita Tejnil; Kuen-Yu Tsai; Alan R. Stivers; H. Kusunose; KUEN-YU TSAI
臺大學術典藏 2018-09-10T05:27:08Z Modeling the defect inspection sensitivity of a confocal microscope Eric M. Gullikson; Edita Tejnil; Kuen-Yu Tsai; Alan R. Stivers; H. Kusunose; KUEN-YU TSAI
臺大學術典藏 2018-09-10T04:59:22Z Design of feedforward filters for improving tracking performances of existing feedback control systems Kuen-Yu Tsai; Charles D. Schaper; Thomas Kailath; KUEN-YU TSAI
臺大學術典藏 2018-09-10T04:59:22Z Design of feedforward filters for improving tracking performances of existing feedback control systems Kuen-Yu Tsai; Charles D. Schaper; Thomas Kailath; KUEN-YU TSAI

Showing items 271-295 of 313  (13 Page(s) Totally)
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