臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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显示项目 51-100 / 313 (共7页)
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机构	日期	题名	作者
臺大學術典藏	2018-09-10T15:26:03Z	Design of an electron-optical system with a ball-tip emission source through a numerical optimization method for high-throughput electron-beam–direct-write lithography	Yu-Tian Shen; Kuen-Yu Tsai; KUEN-YU TSAI; Hsuan-Ping Lee;Sheng-Yung Chen;Chun-Hung Liu;Ding-Qi;Yu-Tian Shen;Kuen-Yu Tsai; Hsuan-Ping Lee; Sheng-Yung Chen; Chun-Hung Liu; Ding-Qi
臺大學術典藏	2018-09-10T15:26:03Z	Design of an electron-optical system with a ball-tip emission source through a numerical optimization method for high-throughput electron-beam–direct-write lithography	Yu-Tian Shen; Kuen-Yu Tsai; KUEN-YU TSAI; Hsuan-Ping Lee;Sheng-Yung Chen;Chun-Hung Liu;Ding-Qi;Yu-Tian Shen;Kuen-Yu Tsai; Hsuan-Ping Lee; Sheng-Yung Chen; Chun-Hung Liu; Ding-Qi
臺大學術典藏	2018-09-10T15:26:03Z	Comparison of the vectorial diffraction theory and Fraunhofer approximation method on diffractive images of Fresnel zone plates	Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:26:03Z	Comparison of the vectorial diffraction theory and Fraunhofer approximation method on diffractive images of Fresnel zone plates	Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:26:03Z	Comparison of the vectorial diffraction theory and Fraunhofer approximation method on diffractive images of Fresnel zone plates	Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:26:03Z	Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution	Yen-Min Lee;Szu-Hung Chen;Chen-Pin Hsu;Pei-Chuen Chiou;Kuen-Yu Tsai;Tien-Tung Chung;Cheng-Han Tsai;Zhan-Yu Liu;Jia-Han Li; Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:26:03Z	Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution	Yen-Min Lee;Szu-Hung Chen;Chen-Pin Hsu;Pei-Chuen Chiou;Kuen-Yu Tsai;Tien-Tung Chung;Cheng-Han Tsai;Zhan-Yu Liu;Jia-Han Li; Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:26:03Z	Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution	Yen-Min Lee;Szu-Hung Chen;Chen-Pin Hsu;Pei-Chuen Chiou;Kuen-Yu Tsai;Tien-Tung Chung;Cheng-Han Tsai;Zhan-Yu Liu;Jia-Han Li; Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:26:03Z	Multilayer Mirror Structure (多層反射鏡結構)	Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:26:03Z	Multilayer Mirror Structure (多層反射鏡結構)	Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:26:03Z	Multilayer Mirror Structure (多層反射鏡結構)	Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:25Z	System and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變監測系統及其方法)	Kuen-Yu Tsai;Sheng-Yung Chen;Jia-Yush Yen;Yung-Yaw Chen;Chi-Hsiang Fan; Kuen-Yu Tsai; Sheng-Yung Chen; Jia-Yush Yen; Yung-Yaw Chen; Chi-Hsiang Fan; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:25Z	System and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變監測系統及其方法)	Kuen-Yu Tsai;Sheng-Yung Chen;Jia-Yush Yen;Yung-Yaw Chen;Chi-Hsiang Fan; Kuen-Yu Tsai; Sheng-Yung Chen; Jia-Yush Yen; Yung-Yaw Chen; Chi-Hsiang Fan; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:25Z	System and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變監測系統及其方法)	Kuen-Yu Tsai;Sheng-Yung Chen;Jia-Yush Yen;Yung-Yaw Chen;Chi-Hsiang Fan; Kuen-Yu Tsai; Sheng-Yung Chen; Jia-Yush Yen; Yung-Yaw Chen; Chi-Hsiang Fan; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties	Yen-Min Lee;Hsin-Hung Cheng;Jia-Han Li;Kuen-Yu Tsai;Yu-Tian Sheng; Yen-Min Lee; Hsin-Hung Cheng; Jia-Han Li; Kuen-Yu Tsai; Yu-Tian Sheng; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties	Yen-Min Lee;Hsin-Hung Cheng;Jia-Han Li;Kuen-Yu Tsai;Yu-Tian Sheng; Yen-Min Lee; Hsin-Hung Cheng; Jia-Han Li; Kuen-Yu Tsai; Yu-Tian Sheng; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties	Yen-Min Lee;Hsin-Hung Cheng;Jia-Han Li;Kuen-Yu Tsai;Yu-Tian Sheng; Yen-Min Lee; Hsin-Hung Cheng; Jia-Han Li; Kuen-Yu Tsai; Yu-Tian Sheng; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises	Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises	Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises	Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Improvement in electron-beam lithography throughput by exploiting relaxed patterning fidelity requirements with directed self-assembly	Hao-Yun Yu;Chun-Hung Liu;Yu-Tian Shen;Hsuan-Ping Lee;Kuen-Yu Tsai; Hao-Yun Yu; Chun-Hung Liu; Yu-Tian Shen; Hsuan-Ping Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Improvement in electron-beam lithography throughput by exploiting relaxed patterning fidelity requirements with directed self-assembly	Hao-Yun Yu;Chun-Hung Liu;Yu-Tian Shen;Hsuan-Ping Lee;Kuen-Yu Tsai; Hao-Yun Yu; Chun-Hung Liu; Yu-Tian Shen; Hsuan-Ping Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Improvement in electron-beam lithography throughput by exploiting relaxed patterning fidelity requirements with directed self-assembly	Hao-Yun Yu;Chun-Hung Liu;Yu-Tian Shen;Hsuan-Ping Lee;Kuen-Yu Tsai; Hao-Yun Yu; Chun-Hung Liu; Yu-Tian Shen; Hsuan-Ping Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts	Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts	Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts	Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging	Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging	Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging	Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Electron-Beam Lithographic Method, System and Method For Controlling Electron-Beam Servo (電子束微影方法、電子束微影伺服控制方法及系統)	Jia-Yush Yen;Kuen-Yu Tsai;Lien-Sheng Chen;Pablo Chiu;Hsin-Fan Tsai; Jia-Yush Yen; Kuen-Yu Tsai; Lien-Sheng Chen; Pablo Chiu; Hsin-Fan Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Electron-Beam Lithographic Method, System and Method For Controlling Electron-Beam Servo (電子束微影方法、電子束微影伺服控制方法及系統)	Jia-Yush Yen;Kuen-Yu Tsai;Lien-Sheng Chen;Pablo Chiu;Hsin-Fan Tsai; Jia-Yush Yen; Kuen-Yu Tsai; Lien-Sheng Chen; Pablo Chiu; Hsin-Fan Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Electron-Beam Lithographic Method, System and Method For Controlling Electron-Beam Servo (電子束微影方法、電子束微影伺服控制方法及系統)	Jia-Yush Yen;Kuen-Yu Tsai;Lien-Sheng Chen;Pablo Chiu;Hsin-Fan Tsai; Jia-Yush Yen; Kuen-Yu Tsai; Lien-Sheng Chen; Pablo Chiu; Hsin-Fan Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Apparatus and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變之估測裝置及其方法)	Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Apparatus and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變之估測裝置及其方法)	Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Apparatus and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變之估測裝置及其方法)	Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Method for Adjusting Status of Particle Beams for Patterning A Substrate and System Using the Same (於一基板上製作圖案時之粒子束狀態調整方法及其系統)	Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Method for Adjusting Status of Particle Beams for Patterning A Substrate and System Using the Same (於一基板上製作圖案時之粒子束狀態調整方法及其系統)	Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Method for Adjusting Status of Particle Beams for Patterning A Substrate and System Using the Same (於一基板上製作圖案時之粒子束狀態調整方法及其系統)	Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Method and Apparatus For Designing Patterning Systems Considering Patterning Fidelity (基於圖案製作真確度之圖案製作系統設計方法與裝置)	Kuen-Yu Tsai;Sheng-Yung Chen;Hoi-Tou Ng;Shiau-Yi Ma; Kuen-Yu Tsai; Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Method and Apparatus For Designing Patterning Systems Considering Patterning Fidelity (基於圖案製作真確度之圖案製作系統設計方法與裝置)	Kuen-Yu Tsai;Sheng-Yung Chen;Hoi-Tou Ng;Shiau-Yi Ma; Kuen-Yu Tsai; Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; KUEN-YU TSAI
臺大學術典藏	2018-09-10T15:00:24Z	Method and Apparatus For Designing Patterning Systems Considering Patterning Fidelity (基於圖案製作真確度之圖案製作系統設計方法與裝置)	Kuen-Yu Tsai;Sheng-Yung Chen;Hoi-Tou Ng;Shiau-Yi Ma; Kuen-Yu Tsai; Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Study of etching bias modeling and correction strategies for compensation of patterning process effects	Philip C. W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C. W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Study of etching bias modeling and correction strategies for compensation of patterning process effects	Philip C. W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C. W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Study of etching bias modeling and correction strategies for compensation of patterning process effects	Philip C. W. Ng;Kuen-Yu Tsai;Lawrence S. Melvin III; Philip C. W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation	Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation	Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation	Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Direct-scatterometry-enabled optical-proximity-correction-model calibration	Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Direct-scatterometry-enabled optical-proximity-correction-model calibration	Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:50:34Z	Direct-scatterometry-enabled optical-proximity-correction-model calibration	Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI

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