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Institution Date Title Author
國立交通大學 2014-12-12T03:10:02Z 半導體微影奈米尺寸的穩定性控制 郭養國; Kuo, Yang-Kuao; 朝春光; Chao, Chuen-Guang
國立交通大學 2014-12-08T15:16:08Z Control ability of spin coating planarization of resist film and optimal control of developers Kuo, Yang-Kuao; Chao, Chuen-Guang

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