臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	Repositories
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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立高雄第一科技大學	2004.12	Optimized HT-AttPSM blanks using Al2O3/TiO2 multilayer films for the 65 nm technology node	Lai, Fu-Der
國立高雄第一科技大學	2004.06	High-transmittance attenuated phase-shift masks using three-stack (Ta2O5)x/(Al2O3)1 − x coatings for the 90 nm-technology node	LAI, Fu-Der
國立高雄第一科技大學	2004.05	Composite thin films of (ZrO2)x-(Al2O3)1-x for high transmittance attenuated phase shift mask in ArF optical lithography	Lai, Fu-Der
國立高雄第一科技大學	1997/01/10	Method of surface modification for tool steels	Wu, Jiann-Kuo; Lai, Fu-Der; 賴富德

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