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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
臺大學術典藏 2018-09-10T14:57:36Z An Electrothermal actuator with two degrees of freedom serving as the arm of a MEMS gripper Chen, D.-S.;Yeh, P.-F.;Chen, Y.-F.;Tsai, C.-W.;Yin, C.-Y.;Lai, R.-J.;Tsai, J.-C.; Chen, D.-S.; Yeh, P.-F.; Chen, Y.-F.; Tsai, C.-W.; Yin, C.-Y.; Lai, R.-J.; Tsai, J.-C.; JUI-CHE TSAI
臺大學術典藏 2018-09-10T14:57:36Z An Electrothermal actuator with two degrees of freedom serving as the arm of a MEMS gripper Chen, D.-S.;Yeh, P.-F.;Chen, Y.-F.;Tsai, C.-W.;Yin, C.-Y.;Lai, R.-J.;Tsai, J.-C.; Chen, D.-S.; Yeh, P.-F.; Chen, Y.-F.; Tsai, C.-W.; Yin, C.-Y.; Lai, R.-J.; Tsai, J.-C.; JUI-CHE TSAI
臺大學術典藏 2018-09-10T07:36:13Z A multiple degress of freedom electrothermal actuator for a versatile MEMS gripper Chen, D.-S.;Yin, C.-Y.;Lai, R.-J.;Tsai, J.-C.; Chen, D.-S.; Yin, C.-Y.; Lai, R.-J.; Tsai, J.-C.; JUI-CHE TSAI
臺大學術典藏 2018-09-10T07:36:13Z A multiple degress of freedom electrothermal actuator for a versatile MEMS gripper Chen, D.-S.;Yin, C.-Y.;Lai, R.-J.;Tsai, J.-C.; Chen, D.-S.; Yin, C.-Y.; Lai, R.-J.; Tsai, J.-C.; JUI-CHE TSAI
臺大學術典藏 2009 Vertical electrothermal actuator with separated metal and nitride structural layers Tsai, J.-C.; Lai, R.-J.; Yin, C.-Y.; Chen, D.-S.; Shen, C.-K.; Chang, Y.-T.; JUI-CHE TSAI; Tsai, J.-C.;Lai, R.-J.;Yin, C.-Y.;Chen, D.-S.;Shen, C.-K.;Chang, Y.-T.
臺大學術典藏 2009 Vertical electrothermal actuator with separated metal and nitride structural layers Tsai, J.-C.; Lai, R.-J.; Yin, C.-Y.; Chen, D.-S.; Shen, C.-K.; Chang, Y.-T.; JUI-CHE TSAI; Tsai, J.-C.;Lai, R.-J.;Yin, C.-Y.;Chen, D.-S.;Shen, C.-K.;Chang, Y.-T.
臺大學術典藏 2009 An out-of-plane rotational platform with in-plane electrostatic combs made by the MetalMUMPs process Tsai, J.-C.;Lai, R.-J.;Yin, C.-Y.;Chen, D.-S.;Yeh, P.-F.; Tsai, J.-C.; Lai, R.-J.; Yin, C.-Y.; Chen, D.-S.; Yeh, P.-F.; JUI-CHE TSAI
臺大學術典藏 2009 An out-of-plane rotational platform with in-plane electrostatic combs made by the MetalMUMPs process Tsai, J.-C.;Lai, R.-J.;Yin, C.-Y.;Chen, D.-S.;Yeh, P.-F.; Tsai, J.-C.; Lai, R.-J.; Yin, C.-Y.; Chen, D.-S.; Yeh, P.-F.; JUI-CHE TSAI

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