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Institution Date Title Author
國立成功大學 2005 Energy dependence of radiation damage in Sb-implanted Si(100) Lai, Yi-Sheng; Chen, Jen-Sue; Ho, Y. S.; Sun, H. L.; Tsai, C. J.; Chen, T. C.; Ko, Y. F.; Lee, F. S.; You, W. M.
國立成功大學 2004 Interlayer growth and electrical behavior of Ta2O5/SiOxNy/Si gate stacks Lai, Yi-Sheng; Chen, Jen-Sue; Wang, J. L.
國立成功大學 2003-05-30 超薄氮氧化矽作為五氧化二鉭閘極氧化層之中介層特性研究 賴宜生; Lai, Yi-Sheng
國立成功大學 2003-05-30 超薄氮氧化矽作為五氧化二鉭閘極氧化層之中介層特性研究 賴宜生; Lai, Yi-Sheng
國立成功大學 2003-05 Evolution of chemical bonding configuration in ultrathin SiOxNy layers grown by low-temperature plasma nitridation Lai, Yi-Sheng; Chen, Jen-Sue
國立成功大學 2002-12-02 Spectroscopic ellipsometry study on the structure of Ta2O5/SiOxNy/Si gate dielectric stacks Lai, Yi-Sheng; Chen, Jen-Sue
國立成功大學 2002-07 Effects of plasma prenitridation and postdeposition annealing on the structural and dielectric characteristics of the Ta2O5/Si system Lai, Yi-Sheng; Chen, Kuan-Jen; Chen, Jen-Sue
國立成功大學 2002-05-15 Investigation of the interlayer characteristics of Ta2O5 thin films deposited on bare, N2O, and NH3 plasma nitridated Si substrates Lai, Yi-Sheng; Chen, Kuan-Jen; Chen, Jen-Sue
國立成功大學 2001-07 Characterization of tantalum pentoxide dielectric films grown by low-pressure and plasma-enhanced chemical vapor deposition Lai, Yi-Sheng; Chen, Jen-Sue
國立成功大學 2001-07 Comparison of dielectric characteristics of Ta2O5 thin films on RuO2 and Ru bottom electrodes Huang, J. H.; Lai, Yi-Sheng; Chen, Jen-Sue

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