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Institution Date Title Author
國立交通大學 2019-04-02T06:00:03Z Suppression of fluorine impurity in blanket chemical vapor deposited tungsten film for via fills with a novel two-step deposition technique Chang, KM; Yeh, TH; Lain, KD; Fu, CM
國立交通大學 2014-12-08T15:48:44Z The characteristics of chemical vapor deposited amorphous-like tungsten film as a gate electrode Chang, KM; Deng, IC; Shih, CW; Lain, KD; Fu, CM
國立交通大學 2014-12-08T15:46:52Z Thermal stability of amorphous-like WNx/W bilayered diffusion barrier for chemical vapor deposited-tungsten/p(+)-Si contact system Chang, KM; Deng, IC; Yeh, TH; Lain, KD; Fu, CM
國立交通大學 2014-12-08T15:01:54Z Suppression of fluorine impurity in blanket chemical vapor deposited tungsten film for via fills with a novel two-step deposition technique Chang, KM; Yeh, TH; Lain, KD; Fu, CM
國立彰化師範大學 2008-04-18 Investigating primary and secondary students’ learning of physics concepts in Taiwan Chang HP;Chen JY;Guo CJ;Chen CC;Chang CY;Lin SH;Su WJ;Lain KD;Hsu SY;Lin JL;Cheng YT;Wang LS;Tseng YT

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