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"lee y m"
Showing items 61-70 of 111 (12 Page(s) Totally)
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| 臺大學術典藏 |
2020-01-17T07:45:17Z |
Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method
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Lee, Y.-M.; Li, J.-H.; Ng, P.C.W.; Pei, T.-H.; Wang, F.-M.; Tsai, K.-Y.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:17Z |
Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method
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Lee, Y.-M.; Li, J.-H.; Ng, P.C.W.; Pei, T.-H.; Wang, F.-M.; Tsai, K.-Y.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:16Z |
Erratum: Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects (Journal of Micro/ Nanolithography, MEMS, and MOEMS (2011) 10 (013004))
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Ng, P.C.W.; Tsai, K.-Y.; Lee, Y.-M.; Wang, F.-M.; Li, J.-H.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:16Z |
Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects
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Ng, P.C.W.; Tsai, K.-Y.; Lee, Y.-M.; Wang, F.-M.; Li, J.-H.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:15Z |
Direct-scatterometry-enabled lithography model calibration
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Chen, C.-Y.; Tsai, K.-Y.; Shen, Y.-T.; Lee, Y.-M.; Li, J.-H.; Shieh, J.J.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:14Z |
Void-based photonic crystal mirror with high reflectivity and low dissipation for extreme-ultraviolet radiation
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Lee, Y.-M.; Li, J.-H.; Tsai, K.-Y.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:12Z |
Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises
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Lee, Y.-M.; Li, J.-H.; Wang, F.-M.; Cheng, H.-H.; Shen, Y.-T.; Tsai, K.-Y.; Shieh, J.J.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:11Z |
Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties
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Lee, Y.-M.; Cheng, H.-H.; Li, J.-H.; Tsai, K.-Y.; Sheng, Y.-T.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:10Z |
Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution
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JIA-HAN LI; Li, J.-H.; Liu, Z.-Y.; Tsai, C.-H.; Chung, T.-T.; Tsai, K.-Y.; Chiou, P.-C.; Hsu, C.-P.; Chen, S.-H.; Lee, Y.-M. |
| 國立臺灣科技大學 |
2020 |
Electrical Tunable PVDF/Graphene Membrane for Controlled Molecule Separation
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Hung, W.-S.;Ho, S.-Y.;Chiao, Y.-H.;Chan, Chan C.-C.;Woon, Woon W.-Y.;Yin, M.-J.;Chang, Chang C.-Y.;Lee, Y.M.;An, Q.-F. |
Showing items 61-70 of 111 (12 Page(s) Totally)
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